REVIEW OF SCIENTIFIC INSTRUMENTS 86, 013704 (2015)
A simple compact UHV and high magnetic field compatible inertial nanopositioner Zongqiang Pang,a) Xiang Li, Lei Xu, Zhou Rong, and Ruilan Liu College of Automation, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu 210003, People’s Republic of China
(Received 6 September 2014; accepted 8 December 2014; published online 12 January 2015) We present a novel simple piezoelectric nanopositioner which just has one piezoelectric scanner tube (PST) and one driving signal, using two short quartz rods and one BeCu spring which form a triangle to press the central shaft and can promise the nanopositioner’s rigidity. Applying two pulse inverted voltage signals on the PST’s outer and inner electrodes, respectively, according to the principle of piezoelectricity, the PST will elongate or contract suddenly while the central shaft will keep stationary for its inertance, so the central shaft will be sliding a distance relative to quartz rods and spring, and then withdraw the pulse voltages slowly, the central shaft will move upward or downward one step. The heavier of the central shaft, the better moving stability, so the nanopositioner has high output force. Due to its compactness and mechanical stability, it can be easily implanted into some extreme conditions, such as ultrahigh vacuum, ultralow temperature, and high magnetic field. C 2015 AIP Publishing LLC. [http://dx.doi.org/10.1063/1.4904846]
I. INTRODUCTION
Since the invention of the scanning probe microscope (SPM), it has played a very important role in the nanotechnology research field.1–3 However, with the research thorough and diversified, more and more people want to study material properties under liquid or some other extreme conditions, like high pressure, ultrahigh magnetic field, and ultralow temperature.4–7 While the most important factor which limited the applying of the SPM is the nanopositioner’s structure and performance. Until now, there are a lot of compact and stable nanopositioners invented, but in real construction of home-build SPM systems, there still exist many drawbacks, take several famous nanopositioners to describe as follows. (1) Pan-type:8 using more than 5 shear piezo stacks to hold central shaft, through sequencing the voltages applied into the piezo stacks to make it sliding with central shaft by turns and fulfillable moving. Due to its working principle and structure, it is hard to minimize its radial dimension which needs most in extreme conditions, and we should use more than five channels of high voltages to drive the nanopositioner moving, which will greatly increase cost and introduce a lot of electronic noise. (2) TunaDrive:9 using one special designed central shaft to be spring inserted into one piezoelectric scanner tube (PST), through push-pull motion of the PST to change the clamping points between PST and central shaft. Although it is compact and has large output force, there are still some defects; for example, we should use high precision machine tool to get one high precision central shaft first. Second, when we use it for scanning directly in a)E-mail: [email protected]
0034-6748/2015/86(1)/013704/4/$30.00
SPM, the shaft will be shaking and we cannot fix another PST on the shaft to perform scanning. (3) PandaDrive10 and KoalaDrive:11 using two PSTs mounted in series and three spring pads holds central shaft, through elongating and contracting of the two PSTs by turns to push the central shaft moving. We should use high precision machine tool to get three same spring pads first and then adjust the friction force of the three carefully; besides, it is difficult to align the three springs in an exact straight line. (4) Inertial type nanopositioner:12,13 using parallel tracks or rail to support the slider, with the help of slider’s inertial force, we can drive the tip or sample moving. In order to make the slider not sliding on the rail,14 Mugele used magnetic field to hold the slider which generated by one small magnet. Because of the small magnet, the nanopositioner’s size becomes larger which is not suitable to be used in some narrow space like high magetic field superconducting magnet. Most importantly, this type of nanopositioner cannot be used in some special scanning probe microscopes which are used in magnetic field environment, such as magnetic field microscope (MFM) in which the magnetic field of the small magnet will change the sample’s magnetic properties. Compared with the above mentioned nanopositioners, our novel nanopositioner has several outstanding advantages as follows. (1) Simple and stable: just used one PST and one cylinder to be the shaft, used two short quartz rods and one BeCu spring fixed on inner wall of the PST that form a triangle to press the central shaft and can promise the nanopositioner’s rigidity, and are easy to be regulated. Most importantly, we use BeCu spring rather than magnet to hold the central shaft, which makes it compatible with UHV, high magnetic field, and ultralow temperature conditions.
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FIG. 1. Schematic view of the novel inertial nanopositioner: (a) sectional view from A-A′ direction of the nanopositioner; (b) top view of the nanopositioner; (c) sectional view from B-B′ direction of the nanopositioner.
(2) High output force: applying one pulsevoltage to the outer electrode or inner electrode of the PST, the PST will elongate or contract suddenly while the central shaft will keep stationary for its inertance, so the central shaft will be sliding a distance relative to quartz rods and spring, and then withdraw the pulse voltages slowly, the central shaft will move upward or downward one step. Normally, the heavier of the shaft, the larger inertance and the better moving stability. So, it is convenient to be used in UHV chamber for tip or sample transferring. (3) Large travel distance: the travel distance is only limited by the central shaft length, which can be used as walker in scanning probe microscopes and precise regulation device in advanced optical systems.
probe microscopes’ design, we can fix another smaller PST on the top of the central shaft. In precision optical systems, we can fix one mirror or any optical device on the central shaft to adjust the light path.15,16 As shown in Figure 3, we applied one driving signal on the outer electrode of the PST, while the inner electrode can be grounded or applied one inverted pulse voltage, depending of the piezoelectric effect of the PST and the inertial law, the PST will elongate or contract suddenly along the axial direction, while the central shaft will keep stationary at that moment, so the central shaft will slide a small distance relative to quartz rods and spring, and then withdraw the pulse voltages slowly,
In this paper, we will describe a very simple compact inertial nanopositioner, which just used one PST and one driving signal. With very low voltage, the nanopositioner can push the central shaft up and down smoothly, which will simplify the driving circuit and lower the noise of crosstalk with the other circuits. Besides its simplicity, compactness, and stability, the most important characteristic is that it has high output force.
II. STRUCTURE AND PRINCIPLE
A schematic and a photo of our novel inertialnanopositioner are shown in Figures 1 and 2, respectively. An EBL#3 PST (from EBL Products, Inc., with length L = 18.5 mm, outer diameter O.D. = 6.3 mm, wall thickness = 0.7 mm) is glued (with H74F epoxy of Epoxy Technology) on a base in which the structure and material depends on the applying conditions. The four electrodes which are connected together and the inner electrode of the scanner formed the drive element, while the round central shaft pressed by two short quartz rods and one mechanically cut rectangular bent BeCu spring together which both glued on the free end of the PST forming a triangle (with H74F epoxy of Epoxy Technology). Because of the work principle and the relationship between inertance and weight, we have very large choice space to select the shaft’s material and design its structure. For example, in various scanning
FIG. 2. The photo of our novel inertial nanopositioner and the output force test setup. The whole weight is 58.5 g which can still be driven up and down smoothly.
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law of motion, the central shaft will move downward a distance 1 G − 2f1′ + f2′ × × (T2 − T1)2 2 m ) ( 2f1′ + f2′ 1 × (T2 − T1)2. = × g− 2 m
∆s1 =
FIG. 3. The driving signal of the inertial nanopositioner.
the central shaft will move upward or downward one step, and so on, the central shaft will carry any device fixed on it to move along any direction slowly. The whole moving process can be seen from Figure 4. Generally, the heavier the shaft, the larger inertance and the better moving stability. In our design, we used one normal tungsten rod as the central shaft. From the parameters of EBL#3 PST, we can calculate the theoretical step size, take 100 V and 100 Hz pulse driving signal, for example, d31 2.62 × 10−10 VL = Vstep = ∆L = thickness 7 × 10−4 ×100 × 18.5 × 10−3 = 692.4(nm). While d31 is the piezoelectric constant of EBL#3 PST in axial direction, thickness is the piezoelectric tube wall thickness, V is the amplitude of the driving signal, and L is the PST’s length. As shown in Figure 4, at the time of T1, the force applied on the shaft is 2f1 + f2 − G = 0 (f1 is the static friction force between shaft and short quartz rods, f2 is the static friction force between shaft and BeCu spring, and G is the gravity of the shaft), and the central shaft kept stationary. If we want to drive the central shaft moving downward, we should apply one positive pulse voltage on the outer electrode of the PST in the time of T2, the PST will elongate suddenly, because of the inertance of the shaft, it will produce relative slipping between shaft and quartz rods, spring, in this period, the force applied on the shaft is F1 = G−2f1′ +f2′ (kinetic friction force is smaller than static friction force), according to the Newton’s second
FIG. 4. (a) Schematic illustration of the working principle of the inertial nanopositioner; (b) schematic diagram of force analysis of the central shaft during the moment T1 − T2 for moving downward.
(1)
At the time of T2, the PST stops elongating, while the central shaft will slide further another ∆s1 distance and stop sliding in the time of T3. During the moment of T3 − T4, the central shaft remains relatively static to the free end of the piezoelectric tube, and there is no relative displacement. So, in one cycle, the upward step size should be ∆L + 2∆s1. Similarly, if we want to drive the central shaft moving upward, we should apply one negative pulse voltage on the outer electrode of the PST in the time of T2, the PST will contract suddenly, as described above, in this period, the force applied on the shaft is F2 = 2f1′ + f2′ + G, so the central shaft will move downward a distance 1 2f ′ + f ′ + G × (T2 − T1)2 ∆s2 = × 1 2 2 m ( ′ ′ ) 2f1 + f2 1 = × + g × (T2 − T1)2. (2) 2 m So, in one cycle, the upward step size of the central shaft should be ∆L − 2∆s2. The whole inertial nanopositioner unit is 18.5 mm tall and 6.3 mm wide (see Figure 2); therefore, it can be easily installed in various extreme conditions (ultrahigh vacuum, ultralow temperature, high magnetic field, etc.).
III. EXPERIMENTAL RESULTS
We have tested the performance of our novel inertial nanopositioner in both upward and downward directions in ambient conditions. As shown in Figure 2, we tested the output force of our novel inertial nanopositioner in which we fixed several coins on the top of the central shaft. Then, we measured the total weight of all the coins which can be driven up and down smoothly under 100 V drive voltage.9 The measured total
FIG. 5. The step size of the inertial nanopositioner as function of driving voltage.
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nanopositioner has high structure rigidity and stability, we can use it to drive the central shaft with the devices fixed on it moving fast or slow steadily. IV. CONCLUSION
We have presented a novel simple piezoelectric nanopositioner, which just used one piezoelectric scanner tube and one driving signal. From the test results, we have confirmed its performance. Apart from the high output force, the nanopositioner is very simple, compact, and can easily be integrated into precision optical systems and extreme conditions.
ACKNOWLEDGMENTS FIG. 6. The step size of the inertial nanopositioner as function of driving frequency.
weight is 58.5 g, which means the output force of our inertial nanopositioner is at least 0.585 N (compared with 0.022 N output force of a surface acoustic wave piezo motor with transducer size being as large as 5 × 50 × 0.5 mm3 in Ref. 17 and 0.35 N of the Tuna Drive9). Compared with those Pan-type and KoalaDrive, our novel inertial nanopositioner can work in low voltage and has high output force. As shown in Figure 5, we tested the step size of our inertial nanopositioner as functions of the driving voltage, in which we applied pulse voltage signal on the outer electrode of the PST and grounded the inner electrode. We set the driving frequency in 100 Hz, for example, we can drive the central shaft moving downward at 25 V and upward at 28 V, respectively, the step size in 100 V of upward and downward is 220.3 nm and 382 nm, respectively, which is consistent with the theoretical calculation of step size difference between upward and downward. Need of special note is when we apply one push-pull driving signal on outer and inner electrode separately, the driving voltage will decrease by half. As shown in Figure 6, we have also tested the step size of our inertial nanopositioner as functions of the driving frequency. We can see that the step size of our inertial nanopositioner has almost nothing to do with the driving frequency within some limits, which means that our inertial
The authors thank Stefan Dürrbeck and Erminald Bertel for helpful discussion. This work was supported by the project of Jiangsu province Natural Science Fund under Grant No. BK20140862, and the Talent importing foundation of Nanjing University of Posts and Telecommunication under Grant No. NY213039. 1G.
Binnig and H. Rohrer, Rev. Mod. Phys. 59, 615 (1987). J. Giessibl, Rev. Mod. Phys. 75, 949 (2013). 3P. Aynajian, E. H. Silva Neto, A. Gyenis, R. Baumbach, J. D. Thompson, Z. Fisk, E. D. Bauer, and A. Yazdani, Nature 486, 201 (2012). 4R. Reichelt, S. Gunther, M. Robler, J. Wintterlin, B. Kubias, B. Jakobi, and R. Schlogl, Phys. Chem. Chem. Phys. 9, 3590 (2007). 5M. Assig, M. Etzkorn, A. Enders, W. Stiepany, C. R. Ast, and K. Kern, Rev. Sci. Instrum. 84, 033903 (2013). 6J. E. Hoffman, E. W. Hudson, K. M. Lang, V. Madhavan, H. Eisaki, S. Uchida, and J. C. Davis, Science 295(5554), 466 (2002). 7T. Nishizaki and N. Kobayashi, J. Phys.: Conf. Ser. 150, 012031 (2009). 8S. H. Pan, E. W. Hudson, and J. C. Davis, Rev. Sci. Instrum. 70, 1459 (1999). 9X. L. Liu and Q. Y. Lu, Rev. Sci. Instrum. 83, 115111 (2012). 10Q. Wang, Y. B. Hou, and Q. Y. Lu, Rev. Sci. Instrum. 84, 056106 (2013). 11V. Cherepanov, P. Coenen, and B. Voigtländer, Rev. Sci. Instrum. 83, 023703 (2012). 12B. L. Blackford, M. H. Jericho, and M. G. Boudreau, Rev. Sci. Instrum. 63, 2206 (1992). 13F. Mugele, A. Rettenberger, J. Boneberg, and P. Leiderer, Rev. Sci. Instrum. 69, 1765 (1998). 14Y. Hou, J. Wang, and Q. Lu, Rev. Sci. Instrum. 79, 113707 (2008). 15S. K. Hung, E. Hwu, M. Y. Chen, and L.C. Fu, IEEE/ASME Trans. Mech. 12(3), 291 (2007). 16S. Verma, W. Kim, and H. Shakir, IEEE Trans. Ind. Appl. 41(5), 1159 (2005). 17M. Takasaki, M. K. Kurosawa, and T. Higuchi, Ultrasonics 38, 51–53 (2000). 2F.
Review of Scientific Instruments is copyrighted by AIP Publishing LLC (AIP). Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. For more information, see http://publishing.aip.org/authors/rights-and-permissions.
A simple compact UHV and high magnetic field compatible inertial nanopositioner Zongqiang Pang,a) Xiang Li, Lei Xu, Zhou Rong, and Ruilan Liu College of Automation, Nanjing University of Posts and Telecommunications, Nanjing, Jiangsu 210003, People’s Republic of China
(Received 6 September 2014; accepted 8 December 2014; published online 12 January 2015) We present a novel simple piezoelectric nanopositioner which just has one piezoelectric scanner tube (PST) and one driving signal, using two short quartz rods and one BeCu spring which form a triangle to press the central shaft and can promise the nanopositioner’s rigidity. Applying two pulse inverted voltage signals on the PST’s outer and inner electrodes, respectively, according to the principle of piezoelectricity, the PST will elongate or contract suddenly while the central shaft will keep stationary for its inertance, so the central shaft will be sliding a distance relative to quartz rods and spring, and then withdraw the pulse voltages slowly, the central shaft will move upward or downward one step. The heavier of the central shaft, the better moving stability, so the nanopositioner has high output force. Due to its compactness and mechanical stability, it can be easily implanted into some extreme conditions, such as ultrahigh vacuum, ultralow temperature, and high magnetic field. C 2015 AIP Publishing LLC. [http://dx.doi.org/10.1063/1.4904846]
I. INTRODUCTION
Since the invention of the scanning probe microscope (SPM), it has played a very important role in the nanotechnology research field.1–3 However, with the research thorough and diversified, more and more people want to study material properties under liquid or some other extreme conditions, like high pressure, ultrahigh magnetic field, and ultralow temperature.4–7 While the most important factor which limited the applying of the SPM is the nanopositioner’s structure and performance. Until now, there are a lot of compact and stable nanopositioners invented, but in real construction of home-build SPM systems, there still exist many drawbacks, take several famous nanopositioners to describe as follows. (1) Pan-type:8 using more than 5 shear piezo stacks to hold central shaft, through sequencing the voltages applied into the piezo stacks to make it sliding with central shaft by turns and fulfillable moving. Due to its working principle and structure, it is hard to minimize its radial dimension which needs most in extreme conditions, and we should use more than five channels of high voltages to drive the nanopositioner moving, which will greatly increase cost and introduce a lot of electronic noise. (2) TunaDrive:9 using one special designed central shaft to be spring inserted into one piezoelectric scanner tube (PST), through push-pull motion of the PST to change the clamping points between PST and central shaft. Although it is compact and has large output force, there are still some defects; for example, we should use high precision machine tool to get one high precision central shaft first. Second, when we use it for scanning directly in a)E-mail: [email protected]
0034-6748/2015/86(1)/013704/4/$30.00
SPM, the shaft will be shaking and we cannot fix another PST on the shaft to perform scanning. (3) PandaDrive10 and KoalaDrive:11 using two PSTs mounted in series and three spring pads holds central shaft, through elongating and contracting of the two PSTs by turns to push the central shaft moving. We should use high precision machine tool to get three same spring pads first and then adjust the friction force of the three carefully; besides, it is difficult to align the three springs in an exact straight line. (4) Inertial type nanopositioner:12,13 using parallel tracks or rail to support the slider, with the help of slider’s inertial force, we can drive the tip or sample moving. In order to make the slider not sliding on the rail,14 Mugele used magnetic field to hold the slider which generated by one small magnet. Because of the small magnet, the nanopositioner’s size becomes larger which is not suitable to be used in some narrow space like high magetic field superconducting magnet. Most importantly, this type of nanopositioner cannot be used in some special scanning probe microscopes which are used in magnetic field environment, such as magnetic field microscope (MFM) in which the magnetic field of the small magnet will change the sample’s magnetic properties. Compared with the above mentioned nanopositioners, our novel nanopositioner has several outstanding advantages as follows. (1) Simple and stable: just used one PST and one cylinder to be the shaft, used two short quartz rods and one BeCu spring fixed on inner wall of the PST that form a triangle to press the central shaft and can promise the nanopositioner’s rigidity, and are easy to be regulated. Most importantly, we use BeCu spring rather than magnet to hold the central shaft, which makes it compatible with UHV, high magnetic field, and ultralow temperature conditions.
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Rev. Sci. Instrum. 86, 013704 (2015)
FIG. 1. Schematic view of the novel inertial nanopositioner: (a) sectional view from A-A′ direction of the nanopositioner; (b) top view of the nanopositioner; (c) sectional view from B-B′ direction of the nanopositioner.
(2) High output force: applying one pulsevoltage to the outer electrode or inner electrode of the PST, the PST will elongate or contract suddenly while the central shaft will keep stationary for its inertance, so the central shaft will be sliding a distance relative to quartz rods and spring, and then withdraw the pulse voltages slowly, the central shaft will move upward or downward one step. Normally, the heavier of the shaft, the larger inertance and the better moving stability. So, it is convenient to be used in UHV chamber for tip or sample transferring. (3) Large travel distance: the travel distance is only limited by the central shaft length, which can be used as walker in scanning probe microscopes and precise regulation device in advanced optical systems.
probe microscopes’ design, we can fix another smaller PST on the top of the central shaft. In precision optical systems, we can fix one mirror or any optical device on the central shaft to adjust the light path.15,16 As shown in Figure 3, we applied one driving signal on the outer electrode of the PST, while the inner electrode can be grounded or applied one inverted pulse voltage, depending of the piezoelectric effect of the PST and the inertial law, the PST will elongate or contract suddenly along the axial direction, while the central shaft will keep stationary at that moment, so the central shaft will slide a small distance relative to quartz rods and spring, and then withdraw the pulse voltages slowly,
In this paper, we will describe a very simple compact inertial nanopositioner, which just used one PST and one driving signal. With very low voltage, the nanopositioner can push the central shaft up and down smoothly, which will simplify the driving circuit and lower the noise of crosstalk with the other circuits. Besides its simplicity, compactness, and stability, the most important characteristic is that it has high output force.
II. STRUCTURE AND PRINCIPLE
A schematic and a photo of our novel inertialnanopositioner are shown in Figures 1 and 2, respectively. An EBL#3 PST (from EBL Products, Inc., with length L = 18.5 mm, outer diameter O.D. = 6.3 mm, wall thickness = 0.7 mm) is glued (with H74F epoxy of Epoxy Technology) on a base in which the structure and material depends on the applying conditions. The four electrodes which are connected together and the inner electrode of the scanner formed the drive element, while the round central shaft pressed by two short quartz rods and one mechanically cut rectangular bent BeCu spring together which both glued on the free end of the PST forming a triangle (with H74F epoxy of Epoxy Technology). Because of the work principle and the relationship between inertance and weight, we have very large choice space to select the shaft’s material and design its structure. For example, in various scanning
FIG. 2. The photo of our novel inertial nanopositioner and the output force test setup. The whole weight is 58.5 g which can still be driven up and down smoothly.
013704-3
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Rev. Sci. Instrum. 86, 013704 (2015)
law of motion, the central shaft will move downward a distance 1 G − 2f1′ + f2′ × × (T2 − T1)2 2 m ) ( 2f1′ + f2′ 1 × (T2 − T1)2. = × g− 2 m
∆s1 =
FIG. 3. The driving signal of the inertial nanopositioner.
the central shaft will move upward or downward one step, and so on, the central shaft will carry any device fixed on it to move along any direction slowly. The whole moving process can be seen from Figure 4. Generally, the heavier the shaft, the larger inertance and the better moving stability. In our design, we used one normal tungsten rod as the central shaft. From the parameters of EBL#3 PST, we can calculate the theoretical step size, take 100 V and 100 Hz pulse driving signal, for example, d31 2.62 × 10−10 VL = Vstep = ∆L = thickness 7 × 10−4 ×100 × 18.5 × 10−3 = 692.4(nm). While d31 is the piezoelectric constant of EBL#3 PST in axial direction, thickness is the piezoelectric tube wall thickness, V is the amplitude of the driving signal, and L is the PST’s length. As shown in Figure 4, at the time of T1, the force applied on the shaft is 2f1 + f2 − G = 0 (f1 is the static friction force between shaft and short quartz rods, f2 is the static friction force between shaft and BeCu spring, and G is the gravity of the shaft), and the central shaft kept stationary. If we want to drive the central shaft moving downward, we should apply one positive pulse voltage on the outer electrode of the PST in the time of T2, the PST will elongate suddenly, because of the inertance of the shaft, it will produce relative slipping between shaft and quartz rods, spring, in this period, the force applied on the shaft is F1 = G−2f1′ +f2′ (kinetic friction force is smaller than static friction force), according to the Newton’s second
FIG. 4. (a) Schematic illustration of the working principle of the inertial nanopositioner; (b) schematic diagram of force analysis of the central shaft during the moment T1 − T2 for moving downward.
(1)
At the time of T2, the PST stops elongating, while the central shaft will slide further another ∆s1 distance and stop sliding in the time of T3. During the moment of T3 − T4, the central shaft remains relatively static to the free end of the piezoelectric tube, and there is no relative displacement. So, in one cycle, the upward step size should be ∆L + 2∆s1. Similarly, if we want to drive the central shaft moving upward, we should apply one negative pulse voltage on the outer electrode of the PST in the time of T2, the PST will contract suddenly, as described above, in this period, the force applied on the shaft is F2 = 2f1′ + f2′ + G, so the central shaft will move downward a distance 1 2f ′ + f ′ + G × (T2 − T1)2 ∆s2 = × 1 2 2 m ( ′ ′ ) 2f1 + f2 1 = × + g × (T2 − T1)2. (2) 2 m So, in one cycle, the upward step size of the central shaft should be ∆L − 2∆s2. The whole inertial nanopositioner unit is 18.5 mm tall and 6.3 mm wide (see Figure 2); therefore, it can be easily installed in various extreme conditions (ultrahigh vacuum, ultralow temperature, high magnetic field, etc.).
III. EXPERIMENTAL RESULTS
We have tested the performance of our novel inertial nanopositioner in both upward and downward directions in ambient conditions. As shown in Figure 2, we tested the output force of our novel inertial nanopositioner in which we fixed several coins on the top of the central shaft. Then, we measured the total weight of all the coins which can be driven up and down smoothly under 100 V drive voltage.9 The measured total
FIG. 5. The step size of the inertial nanopositioner as function of driving voltage.
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nanopositioner has high structure rigidity and stability, we can use it to drive the central shaft with the devices fixed on it moving fast or slow steadily. IV. CONCLUSION
We have presented a novel simple piezoelectric nanopositioner, which just used one piezoelectric scanner tube and one driving signal. From the test results, we have confirmed its performance. Apart from the high output force, the nanopositioner is very simple, compact, and can easily be integrated into precision optical systems and extreme conditions.
ACKNOWLEDGMENTS FIG. 6. The step size of the inertial nanopositioner as function of driving frequency.
weight is 58.5 g, which means the output force of our inertial nanopositioner is at least 0.585 N (compared with 0.022 N output force of a surface acoustic wave piezo motor with transducer size being as large as 5 × 50 × 0.5 mm3 in Ref. 17 and 0.35 N of the Tuna Drive9). Compared with those Pan-type and KoalaDrive, our novel inertial nanopositioner can work in low voltage and has high output force. As shown in Figure 5, we tested the step size of our inertial nanopositioner as functions of the driving voltage, in which we applied pulse voltage signal on the outer electrode of the PST and grounded the inner electrode. We set the driving frequency in 100 Hz, for example, we can drive the central shaft moving downward at 25 V and upward at 28 V, respectively, the step size in 100 V of upward and downward is 220.3 nm and 382 nm, respectively, which is consistent with the theoretical calculation of step size difference between upward and downward. Need of special note is when we apply one push-pull driving signal on outer and inner electrode separately, the driving voltage will decrease by half. As shown in Figure 6, we have also tested the step size of our inertial nanopositioner as functions of the driving frequency. We can see that the step size of our inertial nanopositioner has almost nothing to do with the driving frequency within some limits, which means that our inertial
The authors thank Stefan Dürrbeck and Erminald Bertel for helpful discussion. This work was supported by the project of Jiangsu province Natural Science Fund under Grant No. BK20140862, and the Talent importing foundation of Nanjing University of Posts and Telecommunication under Grant No. NY213039. 1G.
Binnig and H. Rohrer, Rev. Mod. Phys. 59, 615 (1987). J. Giessibl, Rev. Mod. Phys. 75, 949 (2013). 3P. Aynajian, E. H. Silva Neto, A. Gyenis, R. Baumbach, J. D. Thompson, Z. Fisk, E. D. Bauer, and A. Yazdani, Nature 486, 201 (2012). 4R. Reichelt, S. Gunther, M. Robler, J. Wintterlin, B. Kubias, B. Jakobi, and R. Schlogl, Phys. Chem. Chem. Phys. 9, 3590 (2007). 5M. Assig, M. Etzkorn, A. Enders, W. Stiepany, C. R. Ast, and K. Kern, Rev. Sci. Instrum. 84, 033903 (2013). 6J. E. Hoffman, E. W. Hudson, K. M. Lang, V. Madhavan, H. Eisaki, S. Uchida, and J. C. Davis, Science 295(5554), 466 (2002). 7T. Nishizaki and N. Kobayashi, J. Phys.: Conf. Ser. 150, 012031 (2009). 8S. H. Pan, E. W. Hudson, and J. C. Davis, Rev. Sci. Instrum. 70, 1459 (1999). 9X. L. Liu and Q. Y. Lu, Rev. Sci. Instrum. 83, 115111 (2012). 10Q. Wang, Y. B. Hou, and Q. Y. Lu, Rev. Sci. Instrum. 84, 056106 (2013). 11V. Cherepanov, P. Coenen, and B. Voigtländer, Rev. Sci. Instrum. 83, 023703 (2012). 12B. L. Blackford, M. H. Jericho, and M. G. Boudreau, Rev. Sci. Instrum. 63, 2206 (1992). 13F. Mugele, A. Rettenberger, J. Boneberg, and P. Leiderer, Rev. Sci. Instrum. 69, 1765 (1998). 14Y. Hou, J. Wang, and Q. Lu, Rev. Sci. Instrum. 79, 113707 (2008). 15S. K. Hung, E. Hwu, M. Y. Chen, and L.C. Fu, IEEE/ASME Trans. Mech. 12(3), 291 (2007). 16S. Verma, W. Kim, and H. Shakir, IEEE Trans. Ind. Appl. 41(5), 1159 (2005). 17M. Takasaki, M. K. Kurosawa, and T. Higuchi, Ultrasonics 38, 51–53 (2000). 2F.
Review of Scientific Instruments is copyrighted by AIP Publishing LLC (AIP). Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. For more information, see http://publishing.aip.org/authors/rights-and-permissions.
